Coater/developer (ＳＰＲ３０００ series)
Features
Specifications
| ＷＯＲＫ | ２００ｍｍ～３００ｍｍ Ｗａｆｅｒ |
|---|---|
| ＣＵＰ | Ｃｏａｔ＋ＤＥｖ＝ Ｍａｘ ４’ｓ |
| ＢＡＫＥ | ＭＡＸ １６’ｓ （２５０℃） ｉｎｃｌｕｄｅ Ｏｖｅｒｂａｋｅｒｉｄｅ ｆｕｎｃｔｉｏｎ． |
| ＣｏｏｌＰｌａｔｅ | 〇 |
| High viscosity | Original Pump |
| High temperature Bake | (Max 450℃) (Option) |
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